Nanotube micro-opto-mechanical systems

While there have been numerous reports on the electromechanical actuation of carbon nanotubes (CNTs), devices based on the photomechanical actuation of CNTs have been elusive until now. In this paper, we report the integration of single-wall carbon nanotube ensembles into micro-mechanical systems to realize a new carbon nanotube micro-opto-mechanical system (CNT-MOMS). CNT-MOM grippers were fabricated using CMOS compatible techniques involving nanotube film forming, wafer bonding, photolithography, plasma etching and dry release. A MOM-gripper displacement of ∼24 μm was obtained from a gripper of 430 μm in length under infrared laser stimulus and continuous operation of more than 140 000 cycles was acquired. The optical power consumption of the gripper operation was estimated to be as small as ∼240 μW. Manipulation of polystyrene microspheres in air was demonstrated using CNT-MOMS grippers. This study is one good example of how nanomaterials could be integrated into CMOS compatible techniques for applications in high performance MEMS and nanoscale actuation technologies.